Micro pump and method of producing the same

A method of producing a micro pump including a nozzle substrate, a valve substrate, a chamber substrate and a diaphragm substrate, each of said substrates being formed by a material having a silicone as a base material, comprising the steps of:

• forming a discharge port in said nozzle substrate, a port, a valve and a beam for supporting the valve to the substrate in said valve substrate and said chamber substrate, and a suction port and a diaphragm in said diaphragm substrate, in accordance with an etching, respectively;
• forming a thermal oxidation membrane by performing a heat treatment after said etching process is finished;
• laminating a plurality of metal membranes on a whole surface of each of the substrates in the bonding surface side;
• cleaning said metal membrane surface after forming said metal membrane;
• and
• opposing said bonding surfaces under a vacuum condition or an inert atmosphere so as to press and bond.