System and method for providing an integrated gas stick
AssigneeLam Research Corporation
InventorsRichard S. Adachi, Jr., An Le
Life of this patent
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Abstract
The present invention discloses a gas delivery apparatus for control of process and purge gases is disclosed that is suitable for use in a semiconductor processing system. The gas delivery apparatus includes a base plate integrating a printed circuit board and a heating layer. In addition, the gas delivery apparatus includes a plurality of gas stick components mounted on the base plate. Specific gas components are coupled to the integrated printed circuit board, which provides an electrical interface to the control electronics.
Claims20
A gas delivery apparatus for control of process and purge gases, the gas delivery apparatus suitable for use in a semiconductor processing system, the gas delivery apparatus comprising:
- a base plate comprising a printed circuit board and a heating layer wherein the printed circuit board and the heating layer each substantially define a plane and the two defined planes are substantially parallel one another;
- a plurality of gas stick components mounted to the base plate, wherein specific gas stick components are electrically coupled to the printed circuit board through the heating layer.
A gas delivery system for control of process and purge gases, the gas delivery system suitable for use in a semiconductor processing system, the gas delivery system comprising:
- a gas box;
- a plurality of integrated gas sticks coupled to the gas box, wherein each integrated gas stick includes a plurality of gas stick components and a base plate comprising a printed circuit board and a heating layer wherein the printed circuit board and the heating layer each substantially define a plane and the two defined planes are substantially parallel one another, wherein specific gas stick components of each integrated gas stick are electrically coupled to the printed circuit board of that integrated gas stick through the heating layer.
Dependencies are inferred from the claim text.