Anti-reflective coatings for spatial light modulators

A method of manufacturing a spatial light modulator having an array of individually addressable elements, said method including the steps of:

• forming addressing circuitry on a substrate;
• providing an array of active components on said addressing circuitry, said active components comprising a reflective surface, wherein said addressing circuitry activates said active components to cause said reflective surfaces to reflect light to an imaging system;
• and
• wherein at least one of said forming and providing steps includes the step of depositing an anti-reflective coating positioned to prevent light not reaching said reflective surface from entering said imaging system.