FIMS transport box load interface
AssigneeNewport Corporation
InventorsPaul Bacchi, Paul S. Filipski
Life of this patent
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AssigneeNewport Corporation
InventorsPaul Bacchi, Paul S. Filipski
Estimating the term…
A box load interface implemented in a FIMS system includes a retractable port door that is attachable to the box door of a transport box. The port door selectively moves the box door toward or away from the box cover of the transport box to thereby open or close it. A slidable tray is mounted to a support shelf that receives the transport box which is clamped to the slidable tray while it is moved by a positioning mechanism to force the box cover against the port plate. The positioning mechanism also disengages the clamping mechanism to release the box cover as it retracts from the port plate. A port door translation mechanism is operatively connected to the port door to advance it and retract it toward and away from a port plate aperture. A port door elevator assembly operates in cooperation with the port door translation mechanism to move the port door after the box door has been moved away from the box cover and through the port plate aperture. A differential optical scanning assembly detects positions of wafer specimens located in the transport box. A robot assembly is supported by a linear traveling assembly between adjacent port plate apertures for removing and inserting wafer specimens from the transport box. The linear traveling assembly includes a carriage that supports the robot assembly and that travels along a lead screw between the port plate apertures driven by a lead nut mechanism.
In a front-opening interface mechanical standard (FIMS) system including a transport box comprising a front-opening box cover and a removable box door that opens and closes the front opening of the box, a box door latch mechanism operatively connected to a latch actuating coupler to releasibly secure the box door to the box cover in response to rotation of external latch keys inserted into the box to operate the latch actuating coupler, and a box bottom comprising a front clamping feature and a physical alignment interface having mating features that mate with kinematic coupling surfaces to which the transport box is intended to be mounted, a box load interface, comprising:
Dependencies are inferred from the claim text.