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US 6,281,512 B1Granted
Ion implantation system having direct and alternating current sources
AssigneeSamsung Electronics Co., Ltd.
InventorKi-cheol Choi
Life of this patent
Estimating the term…
Abstract
A pre-acceleration or post-acceleration ion implantation system includes an AC (alternating current) power source supplying power in tandem with a DC (direct current) power source. The combined AC and DC power may be supplied, in alternative embodiments, to an ion accelerator and/or an ion extractor of the system.
Claims14
An ion implantation system comprising:
- an ion extractor extracting ions from an ion supply based on application of power from one of a variable direct current power source, and a first direct current power source and a first alternating current power source;
- a mass analyzer receiving the extracted ions and separating the extracted ions based on weight;
- and
- an ion accelerator accelerating ions received from the mass analyzer by applying power to the ions from a second direct current power source and a second alternating current power source.
1 more element
An ion implantation system comprising:
- an ion extractor extracting ions from an ion supply based on application of power from a direct current power source and an alternating current power source;
- a mass analyzer receiving the extracted ions and separating the extracted ions based on weight;
- and
- an ion accelerator for accelerating ions received from the mass analyzer by applying power to the ions from a variable direct current power source.
1 more element
An ion implantation system comprising:
- an ion extractor extracting ions from an ion supply using power from one of a variable direct current power source, and a first direct current power source and a first alternating current power source;
- an ion accelerator accelerating ions received from the ion extractor by applying power to the received ions from a second direct current power source and a second alternating current power source;
- and
- a mass analyzer receiving the accelerated ions and separating the extracted ions based on weight.
1 more element
An ion implantation system comprising:
- an ion extractor extracting ions from an ion supply using power from a direct current power source and an alternating current power source;
- an ion accelerator accelerating ions received from the ion extractor by applying power to the received ions from a variable direct current power source;
- and
- a mass analyzer receiving the accelerated ions and separating the extracted ions based on weight.
1 more element
Dependencies are inferred from the claim text.