Platinum-containing materials and catalysts
AssigneeMicron Technology, Inc.
InventorEugene P. Marsh
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AssigneeMicron Technology, Inc.
InventorEugene P. Marsh
Estimating the term…
In one aspect, the invention includes a method of forming a roughened layer of platinum, comprising: a) providing a substrate within a reaction chamber; b) flowing an oxidizing gas into the reaction chamber; c) flowing a platinum precursor into the reaction chamber and depositing platinum from the platinum precursor over the substrate in the presence of the oxidizing gas; and d) maintaining a temperature within the reaction chamber at from about 0° C. to less than 300° C. during the depositing. In another aspect, the invention includes a platinum-containing material, comprising: a) a substrate; and b) a roughened platinum layer over the substrate, the roughened platinum layer having a continuous surface characterized by columnar pedestals having heights greater than or equal to about one-third of a total thickness of the platinum layer.
A reaction catalyst comprising hemispherical grain platinum.
A reaction catalyst characterized by an outer surface portion of platinum comprising a plurality of columnar pedestals that are at least about 100 Å tall, and wherein the platinum comprises hemispherical grain platinum.
A platinum-comprising material, comprising:
A platinum-containing material, comprising:
A platinum-containing structure, comprising:
Dependencies are inferred from the claim text.