Plasma CVD method
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Mitsunori Sakama, Masaaki Hiroki
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Abstract
In a process of forming a silicon oxide film 116 that constitutes an interlayer insulating film with TEOS as a raw material through the plasma CVD method, the RF output is oscillated at 50 W, and the RF output is gradually increased from 50 W to 250 W (an output value at the time of forming a film) after discharging (after the generation of O2-plasma). A TEOS gas is supplied to start the film formation simultaneously when the RF output becomes 250 W, or while the timing is shifted. As a result, because the RF power supply is oscillated at a low output when starting discharging, a voltage between the RF electrodes can be prevented from changing transitionally and largely.
Claims63
A method of manufacturing a semiconductor device in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating an ion sheath on said surface to be treated by applying an RF power having a first voltage, thereby amount of charge-up on the surface to be treated is saturated;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying an organic silane gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional current does not flow in or on said surface to be treated until the amount of the charge-up is saturated, and
- wherein said second voltage is a sufficient value to decompose the organic silane.
A method of manufacturing a semiconductor device in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating plasma of a first gas by applying an RF power having a first voltage;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying a second gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional current does not flow in or on said surface to be treated until the plasma of the first gas reaches a stationary state, and
- wherein said second voltage is a sufficient value to form said insulating film over said substrate.
A method of manufacturing a semiconductor device in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating oxygen plasma by applying an RF power having a first voltage;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying tetraethoxysilane gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional beard pulse is not observed in voltage waveforms in the moment that the oxygen plasma is generated, and
- wherein said second voltage is a sufficient value to generate tetraethoxysilane/oxygen plasma.
A method of manufacturing an active matrix type display device in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating an ion sheath of oxygen on said surface to be treated by applying an RF power having a first voltage, thereby amount of charge-up on the surface to be treated is saturated;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying an organic silane gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional current does not flow in or on said surface to be treated until the amount of the charge-up is saturated, and
- wherein said second voltage is a sufficient value to generate organic silane-oxygen plasma.
A method of manufacturing an active matrix type display device in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating plasma of a first gas by applying an RF power having a first voltage;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying a second gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional current does not flow in or on said surface to be treated until the plasma of the first gas reaches a stationary state, and
- wherein said second voltage is a sufficient value to generate plasma of said first gas and said second gas.
A method of manufacturing an active matrix type display device in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating oxygen plasma by applying an RF power having a first voltage;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying tetraethoxysilane gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional beard pulse is not observed in voltage waveforms in the moment that the oxygen plasma is generated, and
- wherein said second voltage is a sufficient value to form said insulating film over said substrate.
A method of manufacturing a semiconductor device having a thin film transistor in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating an ion sheath of oxygen on said surface to be treated by applying an RF power having a first voltage, thereby amount of charge-up on the surface to be treated is saturated;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying an organic silane gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional current does not flow in or on said surface to be treated until the amount of the charge-up is saturated, and
- wherein said second voltage is a sufficient value to form said insulating film over said substrate.
A method of manufacturing a semiconductor device having a thin film transistor in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating plasma of a first gas by applying an RF power having a first voltage;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying a second gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional beard pulse is not observed in voltage waveforms until the plasma of the first gas reaches a stationary state, and
- wherein said second voltage is a sufficient value to form said insulating film over said substrate.
A method of manufacturing a semiconductor device having a thin film transistor in which a step of forming an insulating film by plasma CVD method comprising steps of:
- preparing a substrate having a surface to be treated in a reaction chamber;
- generating oxygen plasma by applying an RF power having a first voltage;
- increasing said RF power from said first voltage to a second voltage;
- and
- supplying tetraethoxysilane gas in the chamber at the same time when or after said RF power reaches to the second voltage, thereby said insulating film are formed on said surface to be treated,
- wherein said first voltage is a value so that a transitional current does not flow in or on said surface to be treated in the moment that the oxygen plasma is generated, and
- wherein said second voltage is a sufficient value to generate tetraethoxysilane/oxygen plasma.
Dependencies are inferred from the claim text.