# US 6,281,030 B1 · Fabrication of semiconductor Mach-Zehnder modulator

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- Number: US 6,281,030 B1
- Document ID: US6281030B1
- Status: Granted
- Kind: B1
- Application number: 09/580,896
- Filed: 2000-05-30
- Granted: 2001-08-28
- Earliest claimed: 1997-05-28
- Assignees: NEC Corporation
- Inventors: Junichi Shimizu
- Web page: https://patentgrep.com/patent/US6281030B1

## CPC

- G02F 1/2257: {the optical waveguides being made of semiconducting material}
- G02F 2201/126: push-pull
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

A semiconductor Mach-Zehnder modulator comprises a pair of phase modulator arm waveguides and a single driver for a push-pull modulation. A first electrode connected to p-type cladding layer of first modulator arm is maintained at a negative potential Vπ, a second electrode connected to n-type cladding layer of first modulator arm and p-type cladding layer of second modulator arm is driven by a drive voltage, and a third electrode connected to n-type cladding layer of second modulator arm is maintained at a ground potential. The drive voltage changes between Vπ, and Vπ/2 for push-pull modulation of both modulator arms.

## Claims

### Claim 1

A method for manufacturing a semiconductor Mach-Zehnder modulator comprising the steps of forming a combination mesa structure overlying a substrate, said combination mesa structure including an input optical waveguide, first and second input branch optical waveguides branching off said input optical waveguide, first and second modulator arm waveguides optically coupled to said first and second input branch optical waveguides, respectively, first and second output branch optical waveguides optically coupled to said first and second modulator arm waveguides, respectively, an output optical waveguide optically coupled to both said first and second output branch optical waveguides, each of said waveguide having consecutively a first cladding layer of a first conductivity type, an optical guide layer, a second cladding layer of a second conductivity type, and forming a first electrode electrically connected to said second cladding layer of said first modulator arm waveguide, a second electrode connected to said first cladding layer of said first modulator arm waveguide and said second cladding layer of said second modulator arm waveguide, and a third electrode connected to said first cladding layer of said second modulator arm waveguide.

### Claim 2 (depends on 1)

A method as defined in claim 1, further comprising the steps of forming consecutively said first cladding layer, said active layer and said second cladding layer on an entire surface of said substrate, and selectively etching said second cladding layer, said active layer and a top portion of said first cladding layer to form said combination mesa structure.

### Claim 3 (depends on 2)

A method as defined in claim 2, further comprising, after said selectively etching step, the step of selectively removing a bottom portion of said first cladding layer to leave a contact region for said first cladding layer of each of said first and second modulator arm waveguides.

### Claim 4 (depends on 1)

A method as defined in claim 1, further comprising the steps consecutively forming said first cladding layer, said active layer and said second cladding layer of said combination mesa structure except for said second modulator arm waveguide, and growing consecutively said second cladding layer, said active layer and said first cladding layer for said second modulator arm waveguide.

### Claim 5 (depends on 3)

A method as defined in claim 3, wherein said growing step is effected by a selective growth technique.

### Claim 6 (depends on 4)

A method as defined in claim 4, further comprising the step of forming a contact region for said first cladding layer of said first modulator arm waveguide and a contact region for said second cladding layer of said second modulator arm waveguide.