Method and apparatus for removing high boiling point volatile organic compounds from an exhaust
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHua-Ching Hsu, Ta-Tien Hsiang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHua-Ching Hsu, Ta-Tien Hsiang
Estimating the term…
A method for removing high boiling point volatile organic compounds from an exhaust gas and an apparatus for performing such operation are described. In the method, a wet scrubber is provided which is equipped with a spent water reservoir at the bottom of the scrubber for collecting spent water that contains the volatile organic compounds dissolved in water used to wash the exhaust gas. An ozone gas at a preset concentration is then flown into the spent water to oxidize the dissolved volatile organic compounds contained in the water. The exhaust gas after being washed in the wet scrubber can be released to the atmosphere together with carbon dioxide generated in the oxidation reaction. In the apparatus, an ozone detector is further provided on the exhaust gas outlet in the wet scrubber chamber to verify a content of ozone in the released exhaust gas which is an indication that all the volatile organic compounds have been oxidized in the spent water reservoir. The present invention novel method and apparatus allow the removal of high boiling point, i.e. generally high than 180° C., volatile organic compounds by dissolving in the spent water and then oxidizing by ozone such that harmless carbon dioxide is released into the atmosphere.
A method for removing a high boiling point volatile organic compound from an exhaust gas comprising the steps of:
Dependencies are inferred from the claim text.