Reactor assembly and method of assembly

A method of assembling a reactor vessel having a reservoir container with an open top and a cup supported within the container and accessible through the open top, and an anode support accessible through the open top, comprising the steps of:

• providing an anode;
• providing that said anode and said anode support include therebetween engageable parts which define a bayonet connection;
• lowering said anode through the open top and engaging said parts in a vertical direction;
• and
• turning said anode with respect to said anode support to fully engage said parts.

A reactor for electroplating a microelectronic workpiece, comprising:

• a vessel;
• a cup for holding a supply of process fluid, said cup held within said vessel;
• an anode located within said cup and having a top surface and a bottom surface;
• an anode support mechanically connected to said anode by a connection adapted to be positioned into a fully engaged condition from a fully disengaged condition by relative axial motion and rotation of the anode support and the anode of less than 360 degrees to engage interengaging portions of said anode support with interengaging portions of said anode
• a tool engagable to said anode from a top side thereof to rotate said anode conjointly with said tool.

A reactor for electroplating a microelectronic workpiece, comprising:

• a vessel;
• a cup for holding a supply of process fluid, said cup held within said vessel;
• an anode located within said cup and having a top surface and a bottom surface;
• a diffusion plate and an anode shield, said anode shield arranged against said bottom surface of said anode and having brackets extending above said top surface of said anode, and said diffusion plate carried on said brackets, spaced at a distance above said top surface of said anode, wherein said diffusion plate and said brackets include interengaging parts which are alternately engaged and disengaged by relative turning between the anode and the diffusion plate;
• and
• a tool engageable to said diffusion plate from a top side thereof to rotate said diffusion plate conjointly with said tool.

A reactor for electroplating a microelectronic workpiece, comprising:

• a vessel;
• a cup disposed within the vessel, the cup being configured to support a process fluid;
• an anode assembly positioned within the cup and having an upwardly facing portion and a downwardly facing portion;
• an anode support releasably connected to the anode assembly, one of the anode assembly and the anode support having a radially extending tab member, the other of the anode assembly and the anode support having a circumferential groove with an axial access slot, the tab member being positioned to be removably received in the access slot when at least one of the anode assembly and the anode support is moved axially relative to the other, the tab member engaging at least one surface defining the circumferential groove when at least one of the anode assembly and the anode support is rotated relative to the other to resist relative axial motion between the anode support and the anode assembly;
• and
• a tool having a tool engagement portion positioned to removably engage the upwardly facing portion of the anode assembly, the tool engagement portion being positioned to resist relative axial motion between the tool and the anode assembly upon relative rotation between the tool and the anode assembly.