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US 6,280,489 B1Granted
Polishing compositions
AssigneeNihon Micro Coating Co., Ltd.
InventorsYuji Horie, Hiromitsu Okuyama, Mitsuo Otohata
Life of this patent
Estimating the term…
Abstract
Polishing compositions with phosphoric ester added to a suspension containing abrasive particles can have an improved ability to have the abrasive particles dispersed again after they are left for an extended period of time such that the particles may have condensed into aggregates. Those with abrasive particles such as diamond powder dispersed in an aqueous solution containing a glycol compound, metallic salt of a higher aliphatic acid and phosphoric ester have an improved polishing ability.
Claims2
A polishing composition comprising:
- an aqueous solution containing 65-95 weight % of water, 0.4-4 weight % of a glycol compound, 0.8-8 weight % of metallic salt of a higher aliphatic acid and 0.8-8 weight % of phosphoric ester;
- and
- 0.01-0.5 weight % of abrasive particles dispersed in said aqueous solution.
Dependencies are inferred from the claim text.