Filter apparatus
AssigneeEbara Corporation
InventorsMitsunori Komatsu, Kiyotaka Kawashima, Mutsumi Tanikawa
Life of this patent
Estimating the term…
Abstract
A filter apparatus provided in a fluid pipeline for conveying a treatment fluid. A regenerating pipeline is provided adjacently to the fluid pipeline to convey a regenerating liquid. At least two filter units are switched between the fluid pipeline and the regenerating pipeline by a switching valve device. The filter apparatus enables a filter replacing operation to be carried out smoothly and reliably and is also capable of reliably trapping solid particles contained in the fluid, e.g. an abrasive liquid, continuously without the need of a filter replacing operation, thereby allowing supply of a fluid of high quality and a stable operation free from clogging.
Claims19
A filter apparatus adapted to be connected to a treatment fluid pipeline for conveying a treatment fluid and a filter regenerating device including a regenerating fluid pipeline for conveying a filter regenerating fluid, said filter apparatus comprising:
- at least two filter units;
- and
- a valve device operatively connected to said filter units, said treatment fluid pipeline and said filter regenerating device for connecting a selected one of said at least two filter units to said treatment fluid pipeline while connecting the other filter units to said filter regenerating device so that one of said the other filter units is connected to said regenerating fluid pipeline.
An abrasive liquid supply system for supplying an abrasive liquid to a polishing apparatus, said system comprising:
- an abrasive liquid pipeline for supplying an abrasive liquid to said polishing apparatus;
- and
- a filter apparatus incorporated into said abrasive liquid supplying pipeline, said filter apparatus being provided with a filter regenerating device including a regenerating liquid pipeline for conveying a regenerating liquid,
- said filter apparatus comprising:
- at least two filter units;
- and
- a valve device operatively connected to said filter units, said abrasive liquid pipeline and said filter regenerating device for connecting a selected one of said at least two filter units to said abrasive liquid pipeline while connecting one of the other filter units to said regenerating fluid pipeline.
Dependencies are inferred from the claim text.