US 6,280,299 B1 · Combined slurry dispenser and rinse arm

Abstract

The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.

Claims25

Dependent claims

A substrate polishing apparatus for supplying one or more fluids, comprising:

a) a fluid delivery arm;
b) one or more fluid delivery lines extending at least partially along a length of the fluid delivery arm;
and
c) a shield member disposed from the fluid delivery arm on at least one side of the fluid delivery arm and adapted to reduce splashing of the one or more fluids outwardly of the shield member.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

09/505,577Filed 16 Feb 2000 · continuation

Priority

24 Jun 1997

Granted

28 Aug 2001

Term ends

Not estimatedThe source records don’t support an estimate.

Classification4 codes

B24B 53/017
Devices or means for dressing or conditioning abrasive surfaces: devices or means for dressing, cleaning or otherwise conditioning lapping tools
B24B 37/04
Lapping machines or devices; Accessories: designed for working plane surfaces
B24B 57/02
Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents: for feeding of fluid, sprayed, pulverised, or…
B24B
Machines, devices, or processes for grinding or polishing

Combined slurry dispenser and rinse arm

Life of this patent

Combined slurry dispenser and rinse arm

Life of this patent

Abstract

Claims25