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US 6,280,079 B1Granted
Method of mixing slurries
AssigneeUnited Microelectronics Corp.
InventorsMing-Sheng Yang, Peng-Yih Peng, Chia-Jui Chang, Juan-Yuan Wu
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Abstract
A slurry mixing apparatus has a mixing chamber, a rotatable bearing and several blades. The bearing is connected to one end of each of the blades and located in the center of the mixing chamber. Several kinds of the slurries can be mixed rapidly in the apparatus and flowed into the CMP polisher immediately to perform a CMP process. Being mixed by the mixing chamber, the slurry is supplied to the chemical mechanical polisher for polishing.
Claims8
A method for mixing slurries used in a chemical mechanical polisher, comprising:
- inputting slurries into a mixing chamber, wherein the mixing chamber comprises a plurality of blades and a bearing, and the blades are connected to the bearing;
- driving the blades with a force from the introduction of the slurries into the mixing chamber;
- stirring the slurries by the rotating blades to mix the slurries;
- and
- outputting the slurries into a chemical mechanical polisher.
2 more elements
Dependencies are inferred from the claim text.