Sealed vessel and method of testing the same
AssigneeNEC Corporation
InventorTsuyoshi Yatagai
Life of this patent
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Abstract
The present invention relates to a sealed vessel and a method of testing air tightness of the vessel. In the sealed vessel, the vessel body and a lid are sealed with two O-rings. The sealed vessel has a hole communicating the space sandwiched by the O-rings and the outside of the sealed vessel and a hole communicating the inside and outside of the sealed vessel. In case of testing the air tightness of the inner O-ring, gaseous helium is injected into the space sandwiched by the O-rings and the gaseous helium spread into the vessel is measured. In case of testing the air tightness of the outer O-ring, the vessel is pressurized by the gaseous helium from the outside and the gaseous helium spread in the space sandwiched by the O-rings is measured.
Claims6
A sealed vessel in which two lids and a vessel body are joined at each of the two lids via two concentric ring seals, a hole communicating the inside and outside of the sealed vessel is formed, and holes each communicating the space sandwiched by the concentric ring seals of each of the two lids and the outside of the sealed vessel are formed therein to enable leakage monitoring or air-tight integrity checking across the two concentric ring seals of each of said two lids of said sealed vessel.
A method of leakage monitoring or air-tight integrity testing a sealed vessel in which a lid and a vessel body are joined via two concentric ring seals, comprising the steps of:
- injecting a pressurized tracer gas into a space sandwiched by said seals;
- setting an air pressure in said sealed vessel to be low;
- sensing said gas in said sealed vessel;
- placing said sealed vessel in a pressure vessel;
- injecting a gas into said pressure vessel;
- setting an air pressure in a space sandwiched by said seals to be low;
- and
- sensing said gas in the space sandwiched by said seals.
A method of leakage monitoring or air-tight integrity testing a sealed vessel in which opening parts of two vessels are joined via two concentric ring seals, comprising the steps of:
- injecting a pressurized tracer gas into a space sandwiched by said seals;
- setting an air pressure in said sealed vessel to be low;
- sensing said gas in said sealed vessel;
- placing said sealed vessel in a pressure vessel;
- injecting a gas into said pressure vessel;
- setting an air pressure in a space sandwiched by said seals to be low;
- and
- sensing said gas in the space sandwiched by said seals.
Dependencies are inferred from the claim text.