Automatic reference-pressure balance method

A method for maintaining a consistent pressure in a processing facility having a transfer chamber used to transfer materials to and from a process chamber, wherein the two chambers have a valve there between, the method comprising the steps of:

• determining when the valve is open;
• measuring a pressure of the transfer chamber while the valve is open;
• measuring a pressure of the processing chamber while the valve is open;
• calibrating a pressure sensor on the processing chamber relative to a pressure sensor on the transfer chamber while the valve is open;
• and
• closing the valve when the pressure sensors on the processing chamber and transfer chamber are relatively calibrated.

An automated system for controlling processing of a product in a processing facility, said system compromising:

• first, second, and third chambers;
• first, second, and third pressure sensors associated with the first, second, and third chambers, respectively, for measuring a pressure inside each chamber;
• first, second, and third exhaust lines connected to the first, second, and third chamber, respectively;
• first, second, and third pressure restriction control valves connected to the first, second, and third exhaust lines, respectively;
• a first material transfer valve connecting the first chamber to the second chamber;
• a second material transfer valve connecting the second chamber to the third chamber
• a control module connected to the first and second material transfer valves, the first, second and third pressure sensors, the first, second and third variable restriction control valves, and the first, second and third chambers, the control module including processing capabilities for performing the steps of:
• measuring the pressure in the first and second chamber while the first material transfer valve is closed;
• adjusting the first and second variable restriction control valves until the first and second pressure sensors have similar readings while the first material transfer valve is closed;
• and
• calibrating the first pressure sensor to generate a reading similar to that of the second pressure sensor when the first material transfer valve is open.