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US 6,279,249 B1Granted
Reduced particle contamination manufacturing and packaging for reticles
AssigneeIntel Corporation
InventorsGiang T. Dao, Ronald J. Kuse
Life of this patent
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Abstract
A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. The pellicle frame has included within an absorbent material.
Claims3
An apparatus comprising:
- a carrier having a chamber;
- and
- an ionizer formed integral to said chamber for generating ions for introduction into said chamber.
Dependencies are inferred from the claim text.