Radiation detection device and method of making the same
AssigneeHamamatsu Photonics K.K.
InventorsTakuya Homme, Toshio Takabayashi, Hiroto Sato
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AssigneeHamamatsu Photonics K.K.
InventorsTakuya Homme, Toshio Takabayashi, Hiroto Sato
Estimating the term…
Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. A scintillator made of columnar crystals of CsI is deposited on the light-receiving surface of the light-receiving device array, whereas a protective film in which an Al inorganic film is held between organic films, made of Parylene is laminated thereon. The outer periphery of the protective film is cut at a position where the bonding pads are exposed, and is brought into close contact with the passivation film with the aid of the coating resin.
A radiation detection device comprising:
A method of making a radiation detection device comprising:
A method of mailing a radiation detection device comprising:
Dependencies are inferred from the claim text.