Method for sequentially depositing a three-dimensional network
OwnerOmprakash S. Kolluri, Robert G. Johansoninventors
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Abstract
A method of producing radio frequency discharge plasma film layers having a three-dimensional functional film network. The plasma film layers include a first layer, comprising a plurality of a first functional group, and a second layer, comprising a plurality of a second functional group. The employment of three-dimensional film networks with desired functional groups located either on the periphery or both the periphery and interstitial spaces of the networks provides means for significantly increasing the surface functional density.
Claims26
A method for sequentially depositing a three-dimensional functional film network on a substrate, comprising the steps:
- positioning a substrate having a surface thereon in a radio frequency plasma discharge apparatus;
- inserting into said radio frequency plasma discharge apparatus a first plasma medium, said first plasma medium comprising a first compound selected from the group consisting of ammonia, unsaturated amine, primary amine, aliphatic diamine, polyalkylene polyamine, aminosilane, heterocyclic amine, nitrile, pyrrole, pyrrolidine, saturated carboxylic acid, unsaturated carboxylic acid, carboxylic ester, keto ester and mixtures thereof;
- subjecting said first plasma medium to a first radio frequency electric field whereby a first plasma film layer is deposited on said substrate surface, said first plasma film layer including a plurality of a first functional group;
- inserting into said radio frequency plasma discharge apparatus a second plasma medium, said second plasma medium comprising a second compound selected from the group consisting of ammonia, unsaturated amine, primary amine, aliphatic diamine, polyalkylene polyamine, aminosilane, heterocyclic amine, nitrile, pyrrole, pyrrolidine, saturated carboxylic acid, unsaturated carboxylic acid, carboxylic ester, keto ester and mixtures thereof;
- and
- subjecting said second plasma medium to a second radio frequency electric field whereby a second plasma film layer having a plurality of a second functional group is deposited on said substrate surface, said second plasma film layer having a substantially ordered geometric structure, said structure including a plurality of substantially uniformly dispersed interstitial spaces;
- said second plasma film layer being at least partially covalently bonded to said first plasma film layer.
Dependencies are inferred from the claim text.