Process for the production of a holding device for semiconductor disks and holding device produced by this process

A process for the production of a holding device for semiconductor disks in which a plurality of device parts are assembled and connected with one another to form the holding device, comprising the steps of:

• first manufacturing the device parts individually from single-crystal or polycrystalline silicon and providing the parts with fitting surfaces which correspond with one another;
• joining together the device parts which are adjacent to one another in the holding device by opposite fitting surfaces;
• and
• finally connecting the parts with one another at the fitting surfaces by at least one of diffusion welding and soldering, wherein germanium powder is used as solder wherein, for the purpose of the solder connection of two adjacent device parts, powdered germanium with a grain size of less than 50 μm and a layer thickness of 0.1 to 0.5 mm is first introduced between two respective fitting surfaces of these device parts and the parts are then connected with one another at the fitting surfaces under a pressure of less than 30 mbar and at an ambient temperature between 900° C. to 1350° C.