Prober device having a specific linear expansion coefficient and probe pitch and method of probing thereof
AssigneeInternational Business Machines Corporation
InventorShigetaka Kobayashi
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AssigneeInternational Business Machines Corporation
InventorShigetaka Kobayashi
Estimating the term…
A prober device is disclosed herein for making and maintaining a plurality of discrete electrical connections with an object having a plurality of conductive pads. The prober device includes an insulating substrate having a linear expansion coefficient that is less than or equal to about five times a linear expansion coefficient of the test object and a plurality of conductive probes attached thereto and having a pitch l that is substantially the same as or slightly smaller than a pitch l′ of the conductive pads. When mating the prober device to the object, the prober device is heated to compensate for a difference in the pitches of the conductive pads and of the probes. Correct positioning is permitted as a result of the difference between the linear expansion coefficients of the prober device and the test object.
A method of making and maintaining a plurality of electrical connections to an object having a plurality of conductive pads, comprising the steps of:
Dependencies are inferred from the claim text.