Semiconductor device and method for making the same

Abstract

A semiconductor device having: a first interconnect or electrode formed on a substrate; an organic insulation film which is formed covering the first interconnect or electrode and in which an interconnect trench and an interlayer connection hole reaching from the interconnect trench to the first interconnect or electrode are formed; an inorganic insulation film which is formed covering the side of the interconnect trench and the interlayer connection hole, and into at least surface part of which nitrogen is introduced; a second interconnect or electrode buried into the interconnect trench through the inorganic insulation film; and a buried conductive layer which is formed in the interlayer connection hole and connects between the between the first interconnect or electrode and the second interconnect or electrode.

Dependencies are inferred from the claim text.