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US 6,274,899 B1Granted
Capacitor electrode having conductive regions adjacent a dielectric post
AssigneeMotorola, Inc.
InventorsBradley M. Melnick, Bruce E. White, Jr., Douglas R. Roberts, Bo Jiang
Life of this patent
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Abstract
A dielectric film (110) is formed overlying a semiconductor device substrate (10). A dielectric post (204) having an outer peripheral boundary having sidewalls is formed over the dielectric film (110). A first conductive film (402) is deposited at least along the sidewalls of the dielectric post (204) to form a lower electrode. A capacitor dielectric film (1801) is deposited on the first conductive film, and a upper electrode (1802) is formed on the capacitor dielectric film (1801).
Claims13
A capacitor electrode, comprising:
- a dielectric film having a recess overlying a semiconductor device substrate;
- a dielectric post protruding from the dielectric film, said dielectric post having an outer peripheral boundary defined by sidewalls, and a top surface;
- a first conductive film on the dielectric post, at least along the sidewalls of the dielectric post;
- and a second conductive film under the dielectric post, wherein the second conductive film lines the recess and portions of the dielectric post extend into the recess, the first and second conductive films being electrically connected together and defining portions of a capacitor electrode.
1 more element
A capacitor electrode comprising:
- a dielectric film having a recess overlying a semiconductor device substrate;
- a conductive plug disposed within the recess;
- an oxygen barrier overlying the conductive plug, wherein at least portions of the oxygen barrier are disposed within the recess;
- a dielectric post overlying portions of the oxygen barrier, said dielectric post having an outer peripheral boundary defined by sidewalls, and a top surface;
- a first conductive film on the dielectric post, at least along the sidewalls of the dielectric post;
- a second conductive film under the dielectric post, wherein the second conductive film is electrically coupled to the oxygen barrier;
- and
- a third conductive film overlying the top surface of the dielectric post, wherein the third conductive film is electrically connected to the first and second conductive film, and wherein the first, second, and third conductive films form a portion of a lower capacitor electrode.
5 more elements
Dependencies are inferred from the claim text.