Inspection apparatus and method using particle beam and the particle-beam-applied apparatus

An inspection apparatus employing a particle-beam having a sample-image-obtaining means for scanning said particle-beam on an object sample, the apparatus comprising:

• a focusing-shift-evaluator which generates a plurality of first values of characteristic quantity of focusing shift from a plurality of Fourier spectrum of particle-beam profiles of a standard sample respectively obtained at different focus shift quantities, and a second value of characteristic quantity of focusing shift from a Fourier spectrum of a particle-beam profile of said object sample;
• a memory for storing said particle-beam profiles of said standard sample respectively corresponding to said first values of characteristic quantity and said first values of characteristic quantities of focus shift of said standard sample and said second value of characteristic quantity of focus shift of said object sample;
• a beam-blur-profile generator which estimates a beam-blur profile of said standard sample which corresponds to said second value of characteristic quantity from particle-beam profiles stored in said memory;
• and
• blur-separation means which generates a blur-separated image based upon a reduction of said particle-beam from said object sample image using a de-convolution operation.

An inspection method using a particle beam comprising the steps of:

• performing an adjustment of an astigmatism for said particle beam;
• moving an object sample to one of a plurality of inspection points set in advance for said object sample;
• evaluating a plurality of first values of characteristic quantity of focusing shift from a plurality of Fourier spectrum of particle-beam profiles of a standard sample respectively obtained at different focus shift quantities and a second value of characteristic quantity of focusing shift from a Fourier spectrum of a particle-beam profile of said object sample;
• storing said particle-beam profiles of said standard sample respectively corresponding to said second value of characteristic quantity, and said first values of characteristic quantity of focus shift of standard sample and second value of characteristic quantity of focus shift of said object sample;
• estimating beam-blur profiles of said standard sample which correspond to said second value of characteristic quantity from said particle-beam profiles stored in said first memory;
• and
• separating a blur-separated image based upon a reduction of said second focus shift of said object sample using a de-convolution operation.