Active matrix display device having a common substrate and method of manufacturing the same
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsHongyong Zhang, Masayuki Sakakura
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Abstract
In an active matrix display device integrated with peripheral drive circuits, an image sensor is provided on the same substrate as a pixel matrix and peripheral drive circuits. The image sensor is formed on the substrate having pixel electrodes, pixel TFTs connected to the pixel electrodes and CMOS-TFTs for driving the pixel TFTs. The light receiving unit of the image sensor has light receiving elements having a photoelectric conversion layer and light receiving TFTs. These TFTs are produced in the same step. The lower electrode and transparent electrode of the light receiving element are produced by patterning the same film as the light shielding film and the pixel electrodes arranged in the pixel matrix.
Claims46
An active matrix display device comprising:
- a substrate;
- a pixel matrix having pixel electrodes arranged in a matrix form and first active elements connected to said pixel electrodes, said pixel electrodes and said first active elements being provided over said substrate;
- an image sensor comprising a light receiving unit having photoelectric conversion elements and second active elements connected to the photoelectric conversion elements, said second active elements and said photoelectric conversion elements being provided over said substrate;
- and
- a control circuit provided over said substrate,
- wherein said photoelectric conversion elements and said second active elements are arranged on one row, and
- wherein an image signal representative of an image data is generated in said photoelectric conversion elements and is outputted to said control circuit and said control circuit provides said image data in said pixel matrix to display an image in said pixel matrix.
An active matrix display device comprising:
- a substrate;
- a pixel matrix having pixel electrodes arranged in a matrix form and first active elements connected to said pixel electrodes, said pixel electrodes and said first active elements being provided over said substrate;
- an image sensor comprising a light receiving unit having photoelectric conversion elements and second active elements connected to the photoelectric conversion elements, said second active elements and said photoelectric conversion elements being provided over said substrate;
- and
- a control circuit provided over said substrate,
- wherein said photoelectric conversion elements and said second active elements are arranged on one row,
- wherein an image signal representative of an image data is generated in said photoelectric conversion elements and is outputted to said control circuit and said control circuit provides said image data in said pixel matrix to display an image in said pixel matrix,
- wherein said first active elements comprise first thin film transistors, and said second active elements comprise second thin film transistors, and said control circuit comprises third thin film transistors, and
- wherein said first thin film transistors and said second thin film transistors and said third thin film transistors are provided over said substrate.
An active matrix display device comprising:
- a substrate;
- a pixel matrix having pixel electrodes arranged in a matrix form and first active elements connected to said pixel electrodes, said pixel electrodes and said first active elements being provided over said substrate;
- an image sensor comprising a light receiving unit having photoelectric conversion elements and second active elements connected to the photoelectric conversion elements, said second active elements and said photoelectric conversion elements being provided over said substrate;
- and
- a control circuit provided over said substrate,
- wherein said photoelectric conversion elements and said second active elements are arranged on one row,
- wherein an image signal representative of an image data is generated in said photoelectric conversion elements and is outputted to said control circuit and said control circuit provides said image data in said pixel matrix to display an image in said pixel matrix, and
- wherein said image sensor and said control circuit are provided outside said pixel matrix.
An active matrix display device comprising:
- a substrate;
- a pixel matrix having pixel electrodes arranged in a matrix form and first active elements connected to said pixel electrodes, said pixel electrodes and said first active elements being provided over said substrate;
- an image sensor comprising a light receiving unit having photoelectric conversion elements and second active elements connected to the photoelectric conversion elements, said second active elements and said photoelectric conversion elements being provided over said substrate;
- and
- a control circuit provided over said substrate,
- wherein said photoelectric conversion elements are arranged in a matrix form, and
- wherein an image signal representative of an image data is generated in said photoelectric conversion elements and is outputted to said control circuit and said control circuit provides said image data in said pixel matrix to display an image in said pixel matrix.
An active matrix display device comprising:
- a substrate;
- a pixel matrix having pixel electrodes arranged in a matrix form and first active elements connected to said pixel electrodes, said pixel electrodes and said first active elements being provided over said substrate;
- an image sensor comprising a light receiving unit having photoelectric conversion elements and second active elements connected to the photoelectric conversion elements, said second active elements and said photoelectric conversion elements being provided over said substrate;
- and
- a control circuit provided over said substrate,
- wherein said photoelectric conversion elements are arranged in a matrix form,
- wherein an image signal representative of an image data is generated in said photoelectric conversion elements and is outputted to said control circuit and said control circuit provides said image data in said pixel matrix to display an image in said pixel matrix,
- wherein said first active elements comprise first thin film transistors, and said second active elements comprise second thin film transistors, and said control circuit comprises third thin film transistors, and
- wherein said first thin film transistors and said second thin film transistors and said third thin film transistors are provided over said substrate.
An active matrix display device comprising:
- a substrate;
- a pixel matrix having pixel electrodes arranged in a matrix form and first active elements connected to said pixel electrodes, said pixel electrodes and said first active elements being provided over said substrate;
- an image sensor comprising a light receiving unit having photoelectric conversion elements and second active elements connected to the photoelectric conversion elements, said second active elements and said photoelectric conversion elements being provided over said substrate;
- and
- a control circuit provided over said substrate,
- wherein said photoelectric conversion elements are arranged in a matrix form,
- wherein an image signal representative of an image data is generated in said photoelectric conversion elements and is outputted to said control circuit and said control circuit provides said image data in said pixel matrix to display an image in said pixel matrix, and
- wherein said image sensor and said control circuit are provided outside said pixel matrix.
An active matrix display device comprising:
- a substrate;
- a pixel matrix having pixel electrodes arranged in a matrix form and first active elements connected to said pixel electrodes, said pixel electrodes and said first active elements being provided over said substrate;
- an image sensor comprising light receiving cells having photoelectric conversion elements and second active elements connected to the photoelectric conversion elements, said second active elements and said photoelectric conversion elements being provided over said substrate;
- and
- a control circuit provided over said substrate,
- wherein said photoelectric conversion elements are arranged in a matrix form,
- wherein an image signal representative of an image data is generated in said photoelectric conversion elements and is outputted to said control circuit and said control circuit provides said image data in said pixel matrix to display an image in said pixel matrix, and
- wherein each of said pixel electrodes has an address corresponding to an address of corresponding one of said light receiving cells.
Dependencies are inferred from the claim text.