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US 6,274,410 B1Granted
Method of programming a semiconductor memory
AssigneeInfineon Technologies AG
InventorsHolger Göbel, Gunnar Krause
Life of this patent
Estimating the term…
Abstract
A method of programming a semiconductor memory includes forming a multiplicity of fuse links in at least two mutually parallel planes in a semiconductor body, and separating the fuse links from one another with an electrical insulator. It also includes irradiating a selected fuse link with at least two laser beams and melting the selected fuse link by crossing the laser beams at the selected fuse link.
Claims1
A method of programming a semiconductor memory, which comprises:
- forming a multiplicity of fuse links in at least two mutually parallel planes in a semiconductor body, and separating the fuse links from one another with an electrical insulator;
- irradiating a selected fuse link with at least two laser beams and melting the selected fuse link by crossing the laser beams at the selected fuse link.
Dependencies are inferred from the claim text.