US 6,274,293 B1 · Method of manufacturing flexible metallic photonic band gap structures, and structures resulting therefrom

Abstract

A method of manufacturing a flexible metallic photonic band gap structure operable in the infrared region, comprises the steps of spinning on a first layer of dielectric on a GaAs substrate, imidizing this first layer of dielectric, forming a first metal pattern on this first layer of dielectric, spinning on and imidizing a second layer of dielectric, and then removing the GaAs substrate. This method results in a flexible metallic photonic band gap structure operable with various filter characteristics in the infrared region. This method may be used to construct multi-layer flexible metallic photonic band gap structures. Metal grid defects and dielectric separation layer thicknesses are adjusted to control filter parameters.

Claims38

Dependent claims

A method of manufacturing a flexible metallic photonic band gap structure operable in the infrared region, comprising the steps of:

spinning on a substrate a first layer of dielectric to a first thickness;
imidizing said first layer of dielectric;
forming a first metal pattern on said first layer of dielectric;
spinning on said metal pattern a second layer of dielectric to a second thickness;
imidizing said second layer of dielectric;
and
removing said substrate.

4 more elements

A method of manufacturing a flexible metallic photonic band gap structure, comprising the steps of:

providing a GaAs substrate;
applying a bottom encapsulation layer of polyimide dielectric to said substrate;
forming a first metal pattern on said bottom encapsulation layer;
applying a first polyimide dielectric separation layer on said first metal pattern;
forming a second metal pattern on said first separation layer;
applying a second polyimide dielectric separation layer on said second metal pattern;
forming a third metal pattern on said second separation layer;
applying a top encapsulation layer of polyimide dielectric on said third metal pattern;
and
removing said substrate from said bottom encapsulation layer, resulting in the flexible metallic photonic band gap structure.

7 more elements

Dependencies are inferred from the claim text.

Method of manufacturing flexible metallic photonic band gap structures, and structures resulting therefrom

Life of this patent

Method of manufacturing flexible metallic photonic band gap structures, and structures resulting therefrom

Life of this patent

Abstract

Claims38