Apparatus for plasma ion trimming of frequency devices
AssigneeSaunders & Associates, Inc.
InventorsDwane L. Rose, Mark M. Howse, Ronald K. Wixon
Life of this patent
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Abstract
A system for simultaneous frequency trimming of a plurality frequency devices such as oscillators, crystals and surface acoustic wave filters and resonators by removing intrinsic or previously deposited material through plasma ion bombardment is comprised of a plasma ion chamber, a magazine rack, a vacuum evacuator, a control console, a plasma power supply and a frequency evaluator. The system employs a shutter assembly and shutter control mechanism to individually regulate plasma ion bombardment of a plurality of frequency devices.
Claims20
A system for trimming frequency devices, comprising:
- a plasma ion chamber for ion bombardment of the frequency devices, wherein the plasma ion chamber comprises:
- a bell jar for providing a hermetically sealable chamber for conducting plasma ion bombardment;
- a bell jar hinge assembly coupled to the bell jar for opening and closing a surface of the bell jar;
- an insertion/extraction port coupled to the bell jar for inserting and removing the frequency devices from the plasma ion chamber;
- and
- an ion gun coupled to the bell jar for conducting plasma ionization within the plasma ion chamber;
- a baseplate located internal to the bell jar for mounting a plurality of mechanical components;
- a drive assembly coupled to the baseplate for controlling the movement of a boat containing the frequency devices;
- an ionization station coupled to the baseplate for regulating the plasma ion bombardment of the frequency devices;
- and
- a shutter mechanism coupled to the baseplate for interfacing with the ionization station;
- a magazine rack coupled to the plasma ion chamber for storing a plurality of the frequency devices;
- a vacuum evacuator coupled to the plasma ion chamber for creating a vacuum in the plasma ion chamber;
- a plasma power supply coupled to the plasma ion chamber for providing power to the ion gun;
- a frequency evaluator coupled to the plasma ion chamber for determining the frequency of the frequency devices;
- and
- a control console coupled to the plasma ion chamber, the magazine rack, the vacuum evacuator, the plasma power supply and the frequency evaluator for controlling the operation of the system.
Dependencies are inferred from the claim text.