Method for fabricating orientation-patterned gallium arsenide seeding structures
AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorsLoren A. Eyres, Martin M. Fejer, Christopher B. Ebert, James S. Harris
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Abstract
A method for fabricating gallium arsenide (GaAs) based structure groups with inverted crystallographic orientation to form wavelength converters that utilizes germanium as a crystallographic neutral template layer deposited on a GaAs substrate. A crystallographic inverted gallium arsenide layer is grown on top of the template layer. In a selective trench etching process areas of the substrate are exposed again for a consecutive collective deposition of GaAs.
Claims2
Method for providing a first seeding structure group and a second seeding structure group accessible placed on a wafer, whereby said first seeding structure group comprises a first crystallographic orientation and said second seeding structure group comprises a second crystallographic orientation inverted relative to said first crystallographic orientation, said method comprising following steps:
- a) providing a GaAs based crystalline substrate surface, whereby said crystalline substrate surface comprises:
- 1) a primary crystalline structure;
- and
- 2) a primary crystallographic orientation;
- b) depositing a Ge based thin film of a second material substrate, whereby said second material substrate comprises a crystallographic axis in close lattice match with said primary crystallographic orientation;
- c) providing a crystallization environment surrounding said thin film;
- d) depositing a secondary GaAs based crystalline structure onto said thin film, whereby said crystallization environment stimulates said second crystallographic orientation in close lattice match to said crystallographic axis and being inverted to said first crystallographic orientation;
- and
- e) patterning predetermined areas of said secondary crystalline structure;
- and
- f) defining said first seeding structure group and said second seeding structure group by removing said predetermined areas of said secondary crystalline structure and said thin film.
Dependencies are inferred from the claim text.