Apparatus and method for trapping a toxic gas

An apparatus for trapping a toxic gas comprising:

• a first toxic gas trap having a first inlet and a first outlet,
• a second toxic gas trap having a second inlet and a second outlet, said second toxic gas trap being interchangeable with said first toxic gas trap,
• a first conduit providing fluid communication between said first outlet and said second inlet, said first conduit having a first toxic gas sensor therein, and
• a second conduit providing fluid communication between said second outlet and a gas evacuation device for pulling a toxic gas into said first inlet, wherein said first toxic gas trap is replaced with said second toxic gas trap when a toxic gas is detected by said first toxic gas sensor.

An apparatus for trapping fluorine gas from an exhaust of a laser chamber comprising:

• a first fluorine trap equipped with a first inlet and a first outlet,
• a second fluorine trap equipped with a second inlet and a second outlet, said second fluorine trap being interchangeable with said first fluorine trap,
• a first conduit providing fluid communication between said first outlet and said second inlet, said first conduit equipped with a first fluorine gas sensor, and
• a second conduit providing fluid communication between said second outlet and a gas evacuation device for pulling said exhaust gas from said laser chamber into said first inlet, wherein said first fluorine trap is replaced with said second fluorine trap when fluorine gas is detected by said first fluorine gas sensor.