In-situ automated CMP wedge conditioner
AssigneeInternational Business Machines Corporation
InventorsKent R. Becker, Scott R. Cline, Paul A. Manfredi, Douglas P. Nadeau
Life of this patent
Estimating the term…
Abstract
An apparatus and method of conditioning a CMP polishing pad to ensure consistent polishing throughout the polishing process. In particular, the apparatus consists of a translatable wedge-shaped conditioning plate, having a three point adjustable contact to ensure proper alignment with the polishing pad; a high pressure conditioning spray nozzle to clean the polishing pad and conditioning assembly throughout polishing; and a slurry dispensing nozzle to enhance planarization of the wafer. Further, the frequency of oscillation may be varied by the operator to prevent grooves from forming in the polishing pad.
Claims13
An apparatus for conditioning a polishing pad, comprising:
- a translatable plate positioned above the polishing pad;
- an elongated conduit, coupled to the translatable plate, having a plurality of outlets which deliver fluid to the polishing pad surface;
- and
- a translating system to move the translatable plate relative to the polishing pad.
The apparatus of claim l, wherein the elongated conduit delivers high pressure conditioning fluid to the polishing pad surface.
A method for conditioning a polishing pad surface throughout a polishing process, comprising the steps of:
- providing a translatable conditioning plate in contact with the polishing pad surface;
- oscillating the translatable conditioning plate relative to the rotating polishing pad surface;
- coupling a system, for providing a high pressure spray conditioning fluid, to the translatable conditioning plate;
- and
- dispensing the high pressure spray conditioning fluid over the polishing pad surface.
An apparatus for conditioning a polishing pad, comprising:
- a translatable conditioning plate positioned above the polishing pad;
- a translating means to move the translatable conditioning plate;
- and
- a fluid delivery mechanism affixed to the translatable conditioning plate.
Dependencies are inferred from the claim text.