Piezoelectric vibrator unit, manufacturing method thereof, and ink jet recording head incorporating the same
AssigneeSeiko Epson Corporation
InventorTsuyoshi Kitahara
Life of this patent
Estimating the term…
Abstract
In order to simplify a step of forming a conductive layer for external connection and improve the reliability thereof, at least either internal individual electrodes or internal common electrodes, which include of a piezoelectric vibrator, are connected with each other at through holes situated spaced away from an end face of the piezoelectric vibrator and connected to either a segment electrode of a common electrode, which are formed on one surface in a longitudinal direction of the piezoelectric vibrator. According, it is not necessary to form a conductive layer on the end face or a corner portion where such a layer is hardly formed. Furthermore, even if such portions are slightly broken, the conductivity can be maintained.
Claims14
A piezoelectric vibrator unit in which first conductive layers to be internal individual electrodes and second conductive layers to be internal common electrodes are alternately and overlappingly stacked on each other with piezoelectric materials sandwiched therebetween, comprising;
- through holes piercing through the piezoelectric materials in at least one end portion thereof, said through holes being filled with a conductive material such that at least one of the first conductive layers and the second conductive layers is connected to said one of the first conductive layers and the second conductive layers;
- and
- a first external electrode layer for connecting the conductive material in the through holes.
An ink jet recording head comprising:
- a piezoelectric vibrator unit in which first conductive layers to be internal individual electrodes and second conductive layers to be internal common electrodes are alternately and overlappingly stacked on each other with piezoelectric material sandwiched therebetween, including:
- through holes piercing through the piezoelectric materials in at least one of end portion of thereof, said through holes being filled with conductive material such that at least one of the first conductive layers are connected with each other and the second conductive layers are connected with each other;
- and
- an external electrode layer for connecting the conductive material in the through holes,
- a channel unit including a pressure generating chamber pressurized by the piezoelectric vibrator unit, which communicates with both of a reservoir and a nozzle orifice;
- and
- a head holder for holding the piezoelectric vibrator unit and the channel unit.
Dependencies are inferred from the claim text.