Wafer holding device
AssigneeWinbond Electronics Corp.
InventorJui-Hung Peng
Life of this patent
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Abstract
The present invention relates to a wafer holding device comprising a rotatable base and a plurality of weighted-jaws pivotally coupled on the base. Each of the weighted-jaws is provided with a step portion, used to support and clamp the wafer, and a pendulum weight. The pendulum weight can be integrally formed or detachably hanged on the jaw, depending on the size of the wafer clamped. As the base is rotated at a predetermined velocity, the pendulum weights sway out of the axis of the base due to the centrifugal force generated by the rotation, thereby clamping the wafer in the step portions. The preferred embodiment of the present invention can further provide a stopper formed on the base and a spring connected between the base and each of the jaws so as to keep limit the movement of the jaws within predetermined range.
Claims19
An apparatus for holding an object with centrifugal force while said object is rotated, comprising:
- a base rotatable about an axis with a predetermined velocity;
- and
- at least one jaw coupled to said base and reciprocally movable between a first open position when the base is static and a second position, said jaw having a holding surface for receiving and supporting said object at the first position and for clamping said object at the second position by means of centrifugal force when said base is rotated at the predetermined velocity.
An apparatus for holding an object with centrifugal force while said object is rotated, comprising:
- a base rotatable about an axis with a predetermined velocity;
- a plurality of jaws coupled to said base and reciprocally movable between a first position when the base is static and a second position, each of said jaws having a supporting surface for supporting said object at the first position and for clamping said object at the second position, wherein each of said jaws is provided with a weighted portion for moving said jaw to the second position by means of centrifugal force generated by rotation of said base at the predetermined velocity;
- and
- a limiting device installed on said base so as to limit said jaw's movement between the first position and the second position.
A holding device for clamping a substrate as it is being rotated, comprising:
- a base rotatable about an axis with a predetermined velocity;
- a plurality of jaws pivotally coupled to said base respectively and used to hold said substrate, each of said jaws being reciprocally movable between a first position when the base is static and a second position, and each having a holding surface used for supporting said substrate at the first position and for clamping said object at the second position, wherein said jaws are moved to the second position by centrifugal force generated by the rotation of said base at the predetermined velocity;
- and
- a limiting device comprising a spring connected between each of said jaws and said base so as to limit each of said jaw's movement between the first position and the second position.
Dependencies are inferred from the claim text.