Method and apparatus for curvature-resistant micro-mirror structures to reduce light beam loss in free-space micro-machined optical switches

An apparatus for a micro-mirror, the apparatus comprising:

• an enhanced bending-resistant structure, the structure comprising:
• a bottom poly-silicon layer;
• a phosopho-silicate glass core;
• and
• a top poly-silicon layer,
• wherein the phosopho-silicate glass core is sandwiched between the bottom and top poly-silicon layers;
• and
• a reflective surface layer, which layer is laid down on top of the enhanced bending-resistant structure.

A method of creating a micro-mirror with an enhanced bending-resistant structure for use in a free-space micro-machined optical switch, the method comprising the steps of:

• laying down a first poly-silicate layer as a base;
• placing a phosopho-silicate glass (PSG) core on top of the base;
• laying down a second poly-silicate layer on top of the PSG core and base;
• and
• laying down a reflective surface on top of the second poly-silicate layer.