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US 6,271,900 B1Granted
Integrated microlens and color filter structure
AssigneeIntel Corporation
InventorZong-Fu Li
Life of this patent
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Abstract
The making and use of color microlenses in color image sensors and color display devices is described and claimed. The color microlenses combine the function of a colorless microlens and a color filter into a single structure simplifying the fabrication of, and increasing the reliability of display devices and image sensors using the described color microlenses.
Claims6
A method of forming a color microlens array on a semiconductor structure comprising:
- depositing a first colored microlens resist on a semiconductor surface over a plurality of photodetecting regions that define an image sensing area of an image sensor;
- patterning the first colored microlens resist;
- baking the first colored microlens resist to cause flowing of the first colored microlens resist resulting in at least one microlens with a curved surface directly above one of the plurality of photodetecting regions;
- and,
- repeating the depositing, patterning and baking operations on said semiconductor structure using a second colored microlens resist, said second microlens resist filtering a different color than said first colored microlens resist.
2 more elements
Dependencies are inferred from the claim text.