boundary processing of oblique overlapping graphics to achieve dimensionally accurate electron beam irradiation
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsKinya Kamiyama, Koichi Moriizumi, Hironobu Taoka
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Abstract
A electron beam writing data creating device comprises a redundant part split means for splitting data into a redundant part formed by connecting redundant areas of graphic data processing areas with each other and an internal area defined in the graphic data processing area by the outer periphery of the redundant area. The redundant part split means splits design layout data into the redundant part and the internal area, for independently performing overlap removal processing in each area. Thus, a electron beam writing data creating device capable of effectively suppressing deterioration of dimensional accuracy of a writing pattern can be provided.
Claims10
An electron beam writing data creating device comprising:
- graphic data processing area split means for splitting design layout data for forming a plurality of graphic data processing areas each having redundant areas so that adjacent said graphic data processing areas are in contact with each other and said redundant area of each said graphic data processing area overlaps with adjacent said graphic data processing area;
- redundant part split means for splitting said design layout data into internal areas being defined in said graphic data processing areas by said outer peripheries of said redundant areas of said adjacent graphic data processing areas and redundant parts connecting all said redundant areas with each other;
- overlap removal means for removing overlap of graphic data in said internal areas and said redundant parts independently of each other;
- and
- redundant part removal means for removing overlap of said graphic data in said redundant parts on boundaries between said graphic data processing areas.
A boundary processing method of oblique overlapping graphics to achieve dimensionally accurate electron beam irradiation comprising the steps of:
- splitting design layout data for forming a plurality of graphic data processing areas each having redundant areas so that adjacent said graphic data processing areas are in contact with each other and said redundant area of each said graphic data processing area overlaps with adjacent said graphic data processing area;
- splitting said design layout data into internal areas being defined in said graphic data processing areas by said outer peripheries of said redundant areas of said adjacent graphic data processing areas and redundant parts connecting all said redundant areas with each other;
- removing overlap of graphic data in said internal areas and said redundant parts independently of each other;
- and
- removing overlap of said graphic data in said redundant parts on boundaries between said graphic data processing areas.
Dependencies are inferred from the claim text.