Three dimensional micromachined electromagnetic device and associated methods
AssigneeMems Optical, Inc.
InventorsRodney L. Clark, Robert N. Dean, Jr.
Life of this patent
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Abstract
A micro-electromagnetic device having a three dimensional structure is formed using laser chemical vapor deposition on a conductive surface. Arrays of electromagnetic devices may be formed. Various techniques for facilitating deposition on the conductive surface may be used. A helical antenna for use in the THz region may be formed in accordance with the laser chemical vapor deposition. The antenna is preferably formed on a bolometer.
Claims20
A method of forming a three-dimensional electromagnetic device comprising:
- providing a conductive surface;
- and
- laser chemical vapor depositing a three-dimensional structure on said conductive surface, thereby forming the electromagnetic device, wherein the electromagnetic device is an antenna and said conductive surface serves as a ground plane for the antenna.
A method of forming a three-dimensional electromagnetic device comprising:
- providing a conductive surface;
- and
- laser chemical vapor depositing a three-dimensional structure on said conductive surface, thereby forming the electromagnetic device, wherein said step of providing includes forming a bolometer and said step of depositing forms the three dimensional structure on the bolometer.
A method of forming a three-dimensional electromagnetic device comprising:
- providing a conductive surface;
- and
- laser chemical vapor depositing a three-dimensional structure on said conductive surface, thereby forming the electromagnetic device, wherein the electromagnetic device is an array of electromagnetic devices.
A method of growing three-dimensional structures on a thermally conductive substrate comprising:
- forming a column on the thermally conductive substrate;
- and
- laser chemical vapor depositing the three dimensional structure, including focussing a laser beam on the column,
- wherein said step of forming includes providing a tip on the column, the tip having a diameter which is less than a diameter of a focal point of the laser.
A method of growing three-dimensional structures on a thermally conductive substrate comprising:
- forming a column on the thermally conductive substrate;
- and
- laser chemical vapor depositing the three dimensional structure, including focussing a laser beam on the column, wherein said step of forming includes providing a column having a height which is at least four times its diameter.
An electromagnetic device comprising:
- a conductive surface;
- and
- a fiber grown by laser chemical vapor deposition and having a three-dimensional structure formed on the conductive surface.
A substrate on which a structure grown by laser chemical vapor deposition is to be formed comprising a thermally conductive surface and a thermally conductive column formed on the thermally conductive surface, the growth of the structure being initiated on said thermally conductive column, wherein the tip of the column has a diameter which is less than a diameter of a focal point of a laser used for the laser chemical vapor deposition.
A substrate on which a structure grown by laser chemical vapor deposition is to be formed comprising a thermally conductive surface and a thermally conductive column formed on the thermally conductive surface, the growth of the structure being initiated on said thermally conductive column, wherein the column has a height which is at least four times its diameter.
Dependencies are inferred from the claim text.