Probe card
AssigneeKabushiki Kaisha Nihon Micronics
InventorsYoshiei Hasegawa, Yukihiro Hirai, Tadashi Sugiyama, Takahiko Tandai, Norie Yamaguchi, Satoshi Narita
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AssigneeKabushiki Kaisha Nihon Micronics
InventorsYoshiei Hasegawa, Yukihiro Hirai, Tadashi Sugiyama, Takahiko Tandai, Norie Yamaguchi, Satoshi Narita
Estimating the term…
A probe card including a plurality of probe blocks can be easily put together substantially in a lattice-like form, and four chips adjoining around the intersection portion of imaginary boundary lines intersecting at right angle each other form a cross-like shape to be tested simultaneously. A plurality of probe blocks with the first and second probe group including a plurality of probes are set up on a base plate substantially in the lattice-like form by a probe set-up means. The needle points of the first and second probe groups are respectively located across the imaginary line so as to oppose to each other. A probe blocks located around the lattice intersection portion are fitted to the base plate such that the needle point parts of the probes located in the vicinity of the lattice intersection portion are positioned on the same side with respect to their needle rear part.
A probe card comprising:
A probe card comprising:
A probe card comprising:
Dependencies are inferred from the claim text.