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US 6,271,596 B1Granted
Damascene capacitors for integrated circuits
AssigneeAgere Systems Guardian Corp.
InventorGlenn B. Alers
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AssigneeAgere Systems Guardian Corp.
InventorGlenn B. Alers
Estimating the term…
The present invention relates to a conductive plug capacitor and method of making for use in multi-level integrated circuit structures. In one embodiment, a tungsten plug is formed in a window in a dielectric layer and thereafter a cavity is formed in the plug. This cavity in the plug may serve as the lower electrode for the capacitor, with a layer of dielectric deposited in the cavity and a top metal electrode deposited on the dielectric layer. An alternative embodiment makes use of not only the inner cavity surfaces of the cavity in the tungsten plug, but also the outer sidewalls of the tungsten plug. To this end, after formation of the tungsten plug heading the cavity formed therein, a partial etchback of the dielectric layer in which the tungsten plug is formed is effective. The capacitor dielectric is then deposited on the sidewalls, the top surface and the interior of the cavity of the tungsten plug thereby increasing the area and thereby the over capacitance.
An integrated circuit, comprising:
An integrated circuit, comprising:
An integrated circuit, comprising:
An integrated circuit comprising:
Dependencies are inferred from the claim text.