Semiconductor device and manufacturing method thereof
AssigneeOki Electric Industry Co., Ltd.
InventorShinji Ohuchi
Life of this patent
Estimating the term…
Abstract
Protective tape is bonded onto a rear surface of a semiconductor element prior to a resin sealing step, and then only a primary surface of the semiconductor element is sealed with a resin layer. Cracks and warping which would otherwise be caused by an external force or foreign matter at an exposed rear surface of the semiconductor element are prevented. This facilitates a surface polishing step and also results in a lower profile for the semiconductor device, because the rear surface is not sealed with resin.
Claims16
A semiconductor device comprising:
- a semiconductor element;
- an electrode pad formed at a primary surface of said semiconductor element;
- a resin layer formed at said primary surface at which said electrode pad is formed;
- a means for electrical connection that electrically connects said electrode pad to an external connection terminal;
- and
- protective tape bonded onto a rear surface of said semiconductor element.
A semiconductor device comprising:
- a semiconductor element having a first surface and a second surface, the first surface being an opposite surface with respect to the second surface of the semiconductor element;
- an electrode formed at the first surface of the semiconductor element;
- a wiring portion formed on the first surface of the semiconductor element and connected to the electrode;
- a conductive post formed on the first surface of the semiconductor element and connected to the wiring portion;
- a resin layer formed on the first surface of the semiconductor element so as to cover the first surface of the semiconductor element, the wiring portion and a side of the conductive post;
- an external connection terminal formed on the conductive post;
- and
- a protective layer bonded on the second surface of the semiconductor element.
A semiconductor device comprising:
- a semiconductor element having a first surface and a second surface, the first surface being an opposite surface with respect to the second surface of the semiconductor element;
- an electrode formed at the first surface of the semiconductor element;
- a wiring portion formed on and along the first surface of the semiconductor element and connected to the electrode;
- a conductive post formed on the first surface of the semiconductor element and connected to the wiring portion;
- a resin layer formed on the first surface of the semiconductor element so as to cover the first surface of the semiconductor element, the wiring portion and a side of the conductive post;
- an external connection terminal formed on the conductive post;
- and
- a protective layer bonded on the second surface of the semiconductor element,
- a side of the semiconductor element being exposed from the resin layer and the protective layer.
A semiconductor device comprising:
- a semiconductor element having a first surface and a second surface, the first surface being an opposite surface with respect to the second surface of the semiconductor element;
- an electrode formed at the first surface of the semiconductor element;
- a wiring portion formed on and along the first surface of the semiconductor element and connected to the electrode;
- a conductive post having a first end portion and a second end portion, and being formed on the first surface of the semiconductor element, the first end portion of the conductive post being connected to the wiring portion;
- a resin layer formed on the first surface of the semiconductor element so as to cover the first surface of the semiconductor element, the wiring portion and a side of the conductive post, the second end portion of the conductive post not being covered by the resin layer;
- an external connection terminal formed on the second end of the conductive post;
- and
- a protective layer bonded on the second surface of the semiconductor element,
- only a side of the semiconductor element being exposed from the resin layer and the protective layer.
Dependencies are inferred from the claim text.