A method of fabricating two step, narrow diameter contact holes, in thick insulator layers, for logic cells, and for DRAM array cells, on a semiconductor substrate, comprising the steps of:
- providing polysilicon gate structures, with silicon nitride spacers on the sides of said polysilicon gate structures, on a first silicon dioxide gate insulator layer, with lightly doped source/drain regions, and with heavily doped source/drain regions, in regions of said logic cell, not covered by said polysilicon gate structures, and with a titanium silicide layer on the top surfaces of said polysilicon gate structures, and on the top surfaces of said heavily doped source/drain regions;
- providing silicon nitride capped, polycide gate structures, with silicon nitride spacers on the sides of said silicon nitride capped, polycide gate structures, on a second silicon dioxide gate insulator layer, with lightly doped source/drain regions, in regions of said DRAM array, not covered by said silicon nitride capped, polycide gate structures;
- depositing a first insulator layer;
- planarizing said first insulator layer;
- creating a first SAC opening, in said first insulator layer, between a first silicon nitride capped, polycide gate structure, and a second silicon nitride capped, polycide gate structure, and creating a second SAC opening, in said first insulator layer, between said second silicon nitride capped, polycide gate structure, and a third silicon nitride capped, polycide gate structure;
- depositing a first polysilicon layer, completely filling said first SAC opening, and said second SAC opening;
- patterning of said first polysilicon layer, forming a first polysilicon plug, in said first SAC opening, and forming a second polysilicon plug, in said second SAC opening;
- depositing a second insulator layer;
- forming a first lower contact hole opening, in said second insulator layer, and in said first insulator layer, exposing a heavily doped source/drain region, in said logic cell region;
- forming a second lower contact hole opening, in said second insulator layer, in a top portion of said first insulator layer, and in a silicon nitride layer, of a fourth silicon nitride capped, polycide gate structure, exposing a tungsten silicide layer, of said fourth silicon nitride capped, polycide gate structure;
- forming a third lower contact hole opening, in said second insulator layer, and in said first insulator layer, exposing a portion of the top surface of said second polysilicon plug;
- forming a dual shaped opening in said second insulator layer, comprised of a wide diameter opening, in a top portion of said second insulator layer, and comprised of a narrow diameter opening, in a bottom portion of said second insulator layer, exposing a portion of the top surface of said first polysilicon plug;
- depositing a first tungsten layer;
- patterning of said first tungsten layer to form:
- a first lower tungsten plug, in said first lower contact hole opening;
- a second lower tungsten plug, in said second lower contact hole opening;
- a third lower tungsten plug, in said third lower contact hole opening;
- and a tungsten bit line structure, in said dual shaped opening;
- depositing a third insulator layer;
- forming a storage node opening in said third insulator layer, exposing said third lower tungsten plug;
- depositing a second polysilicon layer, completely filling said storage node opening;
- patterning of said second polysilicon layer, forming the bottom portion of a storage node structure;
- forming the upper portion of said storage node structure, from a third polysilicon layer, with said upper portion of said storage node structure, comprised of vertical and horizontal features of said third polysilicon layer, and overlying said bottom portion of said storage node structure;
- forming a HSG polysilicon layer, on said upper portion of said storage node structure;
- forming a capacitor dielectric layer on said storage node structure;
- forming a polysilicon cell plate, from a fourth polysilicon layer, overlying said storage node structure, resulting in a crown shaped, stacked capacitor structure, comprised of said polysilicon cell plate, said capacitor dielectric layer, and said storage node structure;
- depositing a fourth insulator layer;
- planarizing said fourth insulator layer;
- forming a first upper contact hole opening, in said fourth insulator layer, and in said third insulator layer, exposing the top surface of said first lower tungsten plug;
- forming a second upper contact hole opening in said fourth insulator layer, and in said third insulator layer, exposing the top surface of said second lower tungsten plug;
- forming a third upper contact hole opening, in said fourth insulator layer, exposing a portion of said polysilicon cell plate;
- forming a fourth upper contact hole opening in said fourth insulator layer, and in said third insulator layer, exposing a portion of the top surface of said tungsten bit line structure;
- depositing a second tungsten layer;
- and
- patterning of said second tungsten layer to form:
- a first upper tungsten plug, in said first upper contact hole opening;
- a second tungsten plug, in said second upper contact hole opening;
- a third upper tungsten plug, in said third upper contact hole opening;
- and a fourth tungsten plug, in said fourth upper contact hole opening.