Method of manufacturing a thin film solar battery module

A method of manufacturing an integrated thin film solar battery module comprising a substrate, and a plurality of unit cells connected in series on the substrate, each of said unit cells comprising a first electrode layer, a semiconductor layer and a second electrode layer which are stacked one upon the other on the substrate, said method comprising the steps of:

• partly removing the first electrode layer formed on the substrate to divide the first electrode layer corresponding to the plurality of unit cells;
• forming a semiconductor layer on the first electrode layer;
• partly removing the semiconductor layer for each of a plurality of unit cells to form openings for connection to the first electrode layer;
• forming a second electrode layer on the semiconductor layer;
• partly removing the second electrode layer and the semiconductor layer in the vicinity of the openings formed in the semiconductor layer so as to divide the second electrode layer and the semiconductor layer corresponding to the plurality of unit cells;
• allowing an edge surface of the semiconductor layer to be exposed to the outside by removing residues of the second electrode layer and the semiconductor layer;
• and
• applying a heat treatment at 130° C. or higher after division of the second electrode layer and the semiconductor layer, wherein said heat treatment is carried out for a time sufficient to make a fresh surface of the semiconductor layer nonconductive.