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AssigneeAxsun Technologies, Inc.
InventorsMichael F. Miller, Minh Van Le, Christopher C. Cook, Dale C. Flanders
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A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer on a handle wafer. Concavities are etched into the sacrificial layer. Polycrystalline silicon membrane layer is then formed on the sacrificial layer. The polycrystalline membrane layer is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer is removed to release the membrane. The concavities in the sacrificial layer yield convexities in the polysilicon layer to prevent stiction adhesion to the handle wafer. During processing, a mask used to pattern the membrane layer functions to protect an highly reflecting (HR) coating for the membrane.
A process for fabricating a membrane with an optical coating, the process comprising:
A process for fabricating a membrane with an optical coating, the process comprising:
A process for fabricating a membrane with an optical coating, the process comprising:
A process for fabricating a membrane with an optical coating, the process comprising:
A process for fabricating a membrane with an optical coating, the process comprising:
A process for fabricating a membrane with an optical coating, the process comprising:
Dependencies are inferred from the claim text.