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US 6,270,857 B1Granted
Method of modifying a surface of an insulator
AssigneeSony Corporation
InventorsMinehiro Tonosaki, Mitsunori Ueda, Masato Kobayashi, Hiroyuki Okita
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Abstract
When an insulator is irradiated with an electron beam, a pulse-shape voltage is applied to the insulator from a pulse power source. As a result, a charge-up state of the insulator can be prevented. If an object which must be subjected to surface modification is an insulator, the object can effectively be irradiated with the electron beam to perform the surface modification.
Claims8
A method of modifying a surface of an insulator comprising the steps of:
- holding the insulator on a substrate holder;
- irradiating an electron beam on the insulator;
- and
- applying alternate positive and negative voltage pulses to the substrate holder, thereby implanting secondary ions generated from the insulator into the insulator;
- wherein a peak value of the voltage pulses is in a range of 8 kV to 100 kV.
2 more elements
Dependencies are inferred from the claim text.