Method for manufacturing a layered product
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsKazuyoshi Honda, Noriyasu Echigo, Masaru Odagiri, Nobuki Sunagare
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Abstract
Before forming resin layers and metal thin film layers on a rotating supporting base, a belt-shaped object is run over the supporting base to remove foreign particles adhering to the supporting base. After a resin layer and a metal thin film layer are formed on the belt-shaped object and their formation conditions are optimized, the belt-shaped object is removed, and subsequently a layered product is formed on the supporting base. Thus, foreign objects adhering to the supporting base can be removed, and resin layers and metal thin film layers can be formed as desired.
Claims39
A method for manufacturing a layered product, comprising the steps of:
- forming a resin layer by deposition of a resin material;
- forming a metal-containing thin film layer;
- which steps are repeated a predetermined number of times on a rotating supporting base, so as to manufacture a layered product comprising resin layers and metal-containing thin film layers directly on said supporting base;
- and before the resin layers and metal-containing thin film layers are formed on the supporting base:
- running a belt-shaped object over the supporting base;
- and removing the belt-shaped object from the supporting base.
Dependencies are inferred from the claim text.