Artificial latticed multi-layer film deposition apparatus

An artificial latticed multi-layer film deposition apparatus comprising:

• a target;
• a magnetron magnet disposed on a lower side of said target;
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• a disc shaped dome disposed above said chimney;
• and
• a substrate disposed on a lower surface of said disc shaped dome,
• wherein a plasma ring is generated from an upper surface of said target by an excitation of said magnetron magnet;
• said disc shaped dome is disposed in such a way as allowed to pass over said target a multiple number of times;
• a configuration of said plasma ring has a straight line section perpendicular to the moving direction of said substrate;
• molecules sputtered by said plasma ring are deposited on said substrate,
• a chimney top disposed between said chimney and said substrate so as to close by sealing said end of chimney left open, wherein said disc shaped dome is made rotatable around a center axis thereof, said substrate moves by following a circular path centered around said center axis as said disc shaped dome rotates, and said chimney top has a chimney top opening formed at a position opposing to said target;
• and
• a configuration of said chimney top opening is formed by being surrounded with two arcs, each having a radius different from the other and having a same center as the other with said center coinciding with the center axis of said disc shaped dome, and with two straight lines passing said center axis of said disc shaped dome,
• wherein a relationship between a length “a” measured in a direction tangent to the moving direction of said substrate and a length “b” measured in a radial direction of the moving direction of said substrate satisfies an inequality of “b/a>1”.

An artificial latticed multi-layer film deposition apparatus comprising:

• a target having an upper surface;
• a magnetron magnet disposed on a lower side of said target;
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• a chimney top put in place sealing said end left open;
• and
• a substrate disposed above an upper side of said chimney top,
• wherein said chimney top has a chimney top opening formed at a position opposite to said target;
• said substrate is disposed in such a way as allowed to pass over said chimney top opening a multiple number of times;
• a plasma ring is generated from the upper surface of said target by an excitation of said magnetron magnet, wherein said plasma ring does not touch said chimney top;
• and
• molecules sputtered by said plasma ring pass through said chimney top opening and are deposited on said substrate,
• wherein a distance between said chimney top and said substrate is shorter than a mean free path of said molecules.

An artificial latticed multi-layer film deposition apparatus comprising:

• a target having an upper surface;
• a magnetron magnet disposed on a lower side of said target;
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• a chimney top put in place sealing said end left open;
• and
• a substrate disposed above an upper side of said chimney top,
• wherein said chimney top has a chimney top opening formed at a position opposite to said target;
• said substrate is disposed in such a way as allowed to pass over said chimney top opening a multiple number of times;
• a plasma ring is generated from the upper surface of said target by an excitation of said magnetron magnet, wherein said plasma ring does not touch said chimney top;
• and
• molecules sputtered by said plasma ring pass through said chimney top opening and are deposited on said substrate;
• and
• means for applying DC positive charges to said chimney and chimney top.

An artificial latticed multi-layer film deposition apparatus comprising:

• a target having an upper surface;
• a magnetron magnet disposed on a lower side of said target;
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• a chimney top put in place sealing said end left open;
• and
• a substrate disposed above an upper side of said chimney top, wherein said chimney top has a chimney top opening formed at a position opposite to said target;
• said substrate is disposed in such a way as allowed to pass over said chimney top opening a multiple number of times;
• a plasma ring is generated from the upper surface of said target by an excitation of said magnetron magnet, wherein said plasma ring does not touch said chimney top;
• and
• molecules sputtered by said plasma ring pass through said chimney top opening and are deposited on said substrate;
• and
• means for cooling said chimney and chimney top.

An artificial latticed multi-layer film deposition apparatus comprising:

• a target having an upper surface;
• a magnetron magnet disposed on a lower side of said target;
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• a chimney top put in place sealing said end left open;
• and
• a substrate disposed above an upper side of said chimney top,
• wherein said chimney top has a chimney top opening formed at a position opposite to said target;
• said substrate is disposed in such a way as allowed to pass over said chimney top opening a multiple number of times;
• a plasma ring is generated from the upper surface of said target by an excitation of said magnetron magnet, wherein said plasma ring does not touch said chimney top;
• and
• molecules sputtered by said plasma ring pass through said chimney top opening and are deposited on said substrate;
• and
• an atomic absorption spectrometry apparatus, which is installed between said chimney top and said substrate and has a function of controlling a number of said molecules.

An artificial latticed multi-layer film deposition apparatus comprising:

• a target;
• a magnetron magnet disposed on a lower side of said target;
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• a disc shaped dome disposed above said chimney;
• and
• a substrate disposed on a lower surface of said disc shaped dome,
• wherein a plasma ring is generated from an upper surface of said target by an excitation of said magnetron magnet;
• said disc shaped dome is disposed in such a way as allowed to pass over said target a multiple number of times;
• a configuration of said plasma ring has a straight line section perpendicular to the moving direction of said substrate;
• molecules sputtered by said plasma ring are deposited on said substrate, and an atomic absorption spectrometry apparatus, which is installed between said chimney and said disc shaped dome and has a function of controlling a number of said molecules.

An artificial latticed multi-layer film deposition apparatus comprising:

• a target;
• a magnetron magnet disposed on a lower side of said target;
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• a disc shaped dome disposed above said chimney;
• and
• a substrate disposed on a lower surface of said disc shaped dome,
• wherein a plasma ring is generated from an upper surface of said target by an excitation of said magnetron magnet;
• said disc shaped dome is disposed in such a way as allowed to pass over said target a multiple number of times;
• a configuration of said plasma ring has a straight line section perpendicular to the moving direction of said substrate;
• and
• molecules sputtered by said plasma ring are deposited on said substrate, wherein said plasma ring forms a substantially trapezoidal shape on said upper surface of said target;
• and
• said magnetron magnet is disposed in parallel to a moving direction of said substrate and also disposed along a straight line passing a rotation shaft of said disc shaped dome.

A production method of an artificial latticed multi-layer film comprising the steps of:

• (a) providing a film deposition apparatus having:
• a target,
• a magnetron magnet disposed on a lower side of said target, and
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• (b) disposing a substrate above an upper side of a chimney top opening formed on said end left open at a position opposing to said target;
• (c) generating a plasma ring from an upper surface of said target by an excitation of said magnetron magnet, wherein said plasma ring does not touch said chimney top;
• and
• (d) depositing molecules sputtered by said plasma ring and passed through said chimney top opening on said substrate while said substrate is passing over the upper side of said chimney top opening a multiple number of times;
• wherein said film deposition apparatus furter comprises a disc shaped dome disposed above an upper side of said chimney, said substrate is disposed on a lower surface of said disc shaped dome;
• and at said step (c), said plasma ring is generated so as to have a configuration with a straight line section perpendicular to a moving direction of said substrate, and
• wherein said film deposition apparatus further comprises a chimney top disposed between said chimney and said substrate so as to seal said end left open;
• said chimney top has a chimney top opening formed thereon at a position opposite to said target;
• a configuration of said chimney top opening is formed by being surrounded with two arcs, each having a radius different from the other and having same center as the other with said center coinciding with a center axis of said disc shaped dome, and with two straight lines passing said center axis of said disc shaped dome;
• and
• at said step (d), said disc shaped dome rotates by centering around the center axis thereof;
• and
• said substrate moves by following a circular path centered around said center axis as said disc shaped dome rotates.

A production method of an artificial latticed multi-layer film comprising the steps of:

• (a) providing a film deposition apparatus having:
• a target,
• a magnetron magnet disposed on a lower side of said target, and
• a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;
• (b) disposing a substrate above an upper side of a chimney top opening formed on said end left open at a position opposing to said target;
• (c) generating a plasma ring from an upper surface of said target by an excitation of said magnetron magnet, wherein said plasma ring does not touch said chimney top;
• and
• (d) depositing molecules sputtered by said plasma ring and passed through said chimney top opening on said substrate while said substrate is passing over the upper side of said chimney top opening a multiple number of times;
• wherein said film deposition apparatus fbrther comprises a disc shaped dome disposed above the upper side of said chimney;
• said substrate is disposed on a lower surface of said disc shaped dome;
• said magnetron magnet is disposed in parallel to a moving direction of said substrate and also disposed along a straight line passing a rotation shafi of said disc shaped dome;
• and
• at said step (c), said plasma ring is generated substantially trapezoidal in shape on said upper surface of said target and including a straight line section perpendicular to a moving direction of said substrate.