Coating and developing apparatus
AssigneeTokyo Electron Limited
InventorsShinichiro Araki, Shinko Matsumoto, Noriyuki Anai
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Abstract
A coating and developing apparatus for coating a substrate with a plurality of color resists and for developing it after exposure, comprises: a scrubbing unit for scrubbing the substrate; a coating unit having a plurality of resist discharge nozzles for respectively discharging a plurality of color resists on the scrubbed substrate; and a developing unit for developing the substrate coated with the color resists after exposure. Accordingly, reduction in size of apparatus and space savings can be achieved, and manufacturing cost can also be reduced.
Claims9
A coating and developing apparatus for coating a substrate with a plurality of color resists and for developing it after exposure, comprising:
- a resist coating unit having a plurality of resist discharge nozzles for respectively discharging the plurality of color resists to a substrate;
- and
- a developing unit for developing the substrate coated with the color resist after exposure.
Dependencies are inferred from the claim text.