Apparatus and a method of manufacturing a crystal
AssigneeKomatsu Electronic Metals Co., Ltd.
InventorsShoei Kurosaka, Makoto Kamogawa, Nobuyuki Hukuda, Junsuke Tomioka
Life of this patent
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Abstract
A value of electric current flowing a neck to a melt is detected, and it is judged that a breaking of the neck occurs when the detected value has been zero, and then a seed is lowered to dip a broken part on the melt. After that the seed is lifted again to restart a pulling operation.
Claims5
An apparatus for manufacturing a crystal wherein a lower end of a seed is dipped into a melt and the seed is subjected to lifting including a contraction process of forming a neck beneath a lower end of the seed so as to grow the crystal beneath the seed, comprising:
- means for detecting that the neck grown beneath the lower end of the seed is physically separated into two pieces during the contraction process;
- and
- means for lowering the seed when it is detected that the neck is physically separated into two pieces so as to dip again a lower end of a piece of the neck that is attached to the seed into the melt, and then lifting the seed again.
A method of manufacturing a crystal, wherein a lower end of a seed is dipped into a melt, and the seed is subjected to lifting including a contraction process so as to grow the crystal beneath the seed, comprising the steps of:
- directly detecting that the neck grown beneath the lower end of the seed is physically separated into two pieces during the contraction process;
- and
- dipping again a lower end of a piece of the neck that is attached to the seed into the melt when it is detected that the neck is physically separated into two pieces, and then continuing the contraction process.
Dependencies are inferred from the claim text.