Apparatus and method for precise mixing, delivery and transfer of chemicals

An apparatus for precision mixing of chemicals from at least two bulk sources which comprises:

• at least two metered vessels for receiving a predetermined volume of the chemicals from the bulk sources;
• an angle pipe comprising a first arm and a second arm perpendicular to each other to form a right angle passageway therebetween wherein the first arm having a mounting means assembled to a lower section of the first arm through which the angle pipe is pivotally mounted to an adjustable joint on a dispense line from bottom side of each of the metered vessels such that the angle pipe is so positioned that the height between the right angle passageway and the adjustable joint determines the predetermined volume to be received by the angle pipe and the correspondent metered vessels;
• a mixing vessel having a submerged pipe inside the vessel to enhance chemical mixing;
• a communication means to provide fluid communication among the bulk sources, the metered vessels and the mixing vessels;
• and
• wherein the predetermined volume in the metered vessels is adjustable by changing the height between the right angle passageway and the adjustable joint through upward or downward movement of the angle pipe such that any fluids in excess of the predetermined volume will drain out by gravity flow through a opening of the second arm.

A process for precision mixing of chemicals from at least two bulk sources which comprises;

• providing at least two metered vessels for receiving a predetermined volume of the chemicals from the bulk sources;
• providing an angle pipe comprising a first arm and a second arm perpendicular to each other to form a right angle passageway therebetween wherein the first arm having a mounting means assembled to a lower section of the first arm through which the angle pipe is pivotally mounted to an adjustable joint on a dispense line from bottom side of each of the metered vessels such that the angle pipe is so positioned that the height between the right angle passageway and the adjustable joint determines the predetermined volume to be received by the angle pipe and the correspondent metered vessels;
• providing a mixing vessel for chemical mixing;
• providing means for fluid communication between and among the bulk sources, the metered vessels and the mixing vessels;
• providing a conduit from the mixing vessel to at least one down-stream facility;
• and
• wherein precision mixing is accomplished by motivating chemicals from the respective bulk sources into the metered vessels and the angle pipe until the chemical levels reaches the predetermined volume at which point any excess fluid drains out by gravity flow via openings of the second arm until the fluid levels off near the bottom of the right angle passageway.

An apparatus for providing mixing, transfer and delivery of chemicals in a chemical mechanical planarization (“CMP”) to reduce slurry particle agglomeration from a bulk source to an end-use station which comprises:

• at least one metered vessel for receiving a predetermined volume of the chemicals from the bulk source;
• a swingable angle pipe comprising a first arm and a second arm perpendicular to each other to form a right angle passageway therebetween wherein the swingable angle pipe is pivotally mounted through the first arm to an adjustable joint near a bottom side of the metered vessel such that the swingable angle pipe is so positioned that the height between the right angle passageway and the adjustable joint determines the predetermined volume to be received by the swingable angle pipe and the correspondent metered vessel;
• a mixing vessel for chemical mixing;
• a bulk intake line providing fluid communication between the bulk source and the metered vessel;
• a dispense line providing fluid communication between the metered vessel and the mixing vessel;
• a short vessel installed atop of a plurality of small diameter vessels for storage of chemicals after delivery from the mixing vessel, the short vessel connected with each of the small diameter vessels through a plurality of respective lines so a problem of dry slurry particle build up will occur solely in the short vessel, rather in every of the small diameter vessels;
• and
• wherein the chemicals are motivated through a valve controlled air pressure from the small diameter vessels to the end-use station.

An apparatus for providing mixing, transfer and delivery of chemicals in a chemical mechanical planarization (“CMP”) to reduce slurry particle agglomeration from a bulk source to an end-use station which comprises:

• at least one metered vessel for receiving a predetermined volume of the chemicals from the bulk source;
• an angle pipe comprising a first arm and a second arm perpendicular to each other to form a right angle passageway therebetween wherein the first arm having a mounting means assembled to a lower section of the first arm through which the angle pipe is pivotally mounted to an adjustable joint on a dispense line from bottom side of each of the metered vessels such that the angle pipe is so positioned that the height between the right angle passageway and the adjustable joint determines the predetermined volume to be received by the angle pipe and the correspondent metered vessels;
• a mixing vessel having a submerged pipe inside the vessel to enhance chemical mixing;
• a communication means to provide fluid communication among the bulk sources, the metered vessels and the mixing vessels;
• a short pipe vessel installed atop of a plurality of small diameter vessels for storage of chemicals after delivery from the mixing vessel, the short vessel connected with each of the small diameter vessels through a plurality of respective lines so a problem of dry slurry particle build up will occur solely in the top short vessel, rather in every of the small diameter vessels;
• and
• wherein the chemicals are motivated through a valve controlled air pressure from the small diameter vessels to the end-use station.

An apparatus for providing transfer and delivery of chemicals in a chemical mechanical planarization (“CMP”) to reduce slurry particle agglomeration from a bulk source to an end-use station which comprises:

• a source vessel to provide the chemicals for CMP;
• a short vessel installed atop of a plurality of small diameter vessels for storage of chemicals after delivery from mixing vessels, the short vessel connected with each of the small diameter vessels through a plurality of respective lines so a problem of dry slurry particle build up will occur solely in the short vessel, rather in every of the small diameter vessels;
• and
• wherein the chemicals are motivated through a valve controlled air pressure from the small diameter vessels to the end-use station.