Micro-injecting device having a membrane having an organic layer and a metallic layer and method for manufacturing the same

A micro-injecting device, comprising:

• a substrate;
• a protection film formed on said substrate;
• a heating resistor layer formed on a portion of said protection film, for heating a heating chamber;
• an electrode layer formed on said protection film and which contacts said heating resistor layer, for transmitting an electric signal to said heating resistor layer;
• a heating chamber barrier layer formed on said electrode layer and defining a heating chamber enclosing said heating resistor layer, said heating chamber having an axis, said heating chamber for holding a working liquid;
• a membrane formed on the heating chamber barrier layer for transmitting volume changes of the liquid in the heating chamber, said membrane comprising:
• an organic film formed over an entire heating chamber barrier layer and covering the heating chamber;
• and
• an impact film formed on a portion of said organic film, said impact film centered on an axis of the heating chamber;
• a liquid chamber barrier layer formed on a portion of the membrane and defining a liquid chamber, said liquid chamber being coaxial with said heating chamber and a center of said impact film;
• and
• a nozzle plate formed on said liquid chamber barrier layer, said nozzle plate having a nozzle coaxial with said liquid chamber, said membrane further comprising:
• an auxiliary organic film formed of a same material as said organic film, said auxiliary organic film being formed on a portion of the organic film overlapping an upper edge of the heating chamber, a side surface of the auxiliary organic film contacting a side surface of said impact film, and said auxiliary organic film disposed between said organic film and said liquid chamber barrier layer.